| Item | Technical Property | |
|---|---|---|
| Argon (Ar) purity (volume fraction)/10-2 ≥ | 99.9999 | 99.9992 |
| Hydrogen (H2) content (volume fraction)/10-6 ≤ | 0.1 | 1 |
| Nitrogen (N2) content (volume fraction)/10-6 ≤ | 0.5 | 5 |
| Oxygen (O2) content (volume fraction)/10-6 ≤ | 0.2 | 0.5 |
| Carbon monoxide (CO) & Carbon dioxide (CO2) (volume fraction)/10-6 ≤ | CO: 0.1 CO2: 0.1 |
0.5 |
| Total hydrocarbon (calculated by methane) (volume fraction)/10-6 ≤ | 0.1 | 0.5 |
| Water (H2O) content (volume fraction)/10-6 ≤ | 0.2 | 0.5 |
| Total impurity content (volume fraction)/10-6 ≤ | 1 | 8 |
| Grain | Agreed by the Supplier and the Demander | |
Mainly used for purging, protection, and pressurization of the system. It can also be used in chemical vapor deposition (CVD), sputtering, plasma and active ion etchant, annealing, and other different processes, as well as in electronic special mixed gas.
Two primary high-purity grades are offered: an ultra-high purity grade reaching ≥ 99.9999% (with total impurities ≤ 1 ppm) and a standard high-purity grade reaching ≥ 99.9992% (with total impurities ≤ 8 ppm).
The gas is primarily utilized for system purging, protection, and pressurization. In advanced electronics, it is critical for chemical vapor deposition (CVD), sputtering, plasma and reactive/active ion etching, annealing, and electronic special gas mixtures.
As specified in the technical standards, the water (H2O) content of liquid argon must be analyzed and measured after full gasification to ensure analytical accuracy.
For the 99.9999% purity grade, oxygen (O2) is controlled to ≤ 0.2 ppm and water (H2O) to ≤ 0.2 ppm. For the 99.9992% grade, both oxygen and moisture are kept to ≤ 0.5 ppm.
Particulate and grain control specifications are customized and agreed upon directly between the supplier and the demander according to precise customer application requirements.
For the highest purity grade, carbon monoxide (CO) and carbon dioxide (CO2) are each strictly restricted to ≤ 0.1 ppm. For the secondary grade, total combined content is limited to ≤ 0.5 ppm.
