| Item | Technical Property | ||
|---|---|---|---|
| Pure oxygen | High purity oxygen | Ultrapure oxygen | |
| Oxygen (O2) purity (volume fraction)/10-2 ≥ | 99.995 | 99.999 | 99.9999 |
| Hydrogen (H2) content (volume fraction)/10-6 ≤ | 1 | 0.5 | 0.1 |
| Argon (Ar) content (volume fraction)/10-6 ≤ | 10 | 2 | 0.2 |
| Nitrogen (N2) content (volume fraction)/10-6 ≤ | 20 | 5 | 0.1 |
| Carbon dioxide (CO2) content (volume fraction)/10-6 ≤ | 1 | 0.5 | 0.1 |
| Total hydrocarbon content (volume fraction) (calculated by methane)/10-6 ≤ | 2 | 0.5 | 0.1 |
| Water (H2O) content (volume fraction)/10-6 ≤ | 3 | 2 | 0.5 |
Application field: mainly used in the preparation of standard gas mixture, scientific research, production of integrated circuits and semiconductor devices, and other fields with high requirements for oxygen purity.
The grades are categorized by volume fraction purity: Pure oxygen (≥ 99.995%), High purity oxygen (≥ 99.999%), and Ultrapure oxygen (≥ 99.9999%).
It is primarily applied in manufacturing integrated circuits and semiconductor components, preparing calibrated standard gas mixtures, supporting scientific laboratory research, and serving high-precision industries.
Water (H₂O) content is restricted to ≤ 0.5 × 10⁻⁶ for Ultrapure oxygen, compared to ≤ 2 × 10⁻⁶ for High purity oxygen and ≤ 3 × 10⁻⁶ for Pure oxygen.
Total hydrocarbon content (calculated as methane) is limited to ≤ 2 × 10⁻⁶ in Pure oxygen, ≤ 0.5 × 10⁻⁶ in High purity oxygen, and reduced down to ≤ 0.1 × 10⁻⁶ in Ultrapure oxygen.
In Ultrapure oxygen, Argon (Ar) is maintained at ≤ 0.2 × 10⁻⁶ and Nitrogen (N₂) at ≤ 0.1 × 10⁻⁶. In standard Pure oxygen, the thresholds are ≤ 10 × 10⁻⁶ for Ar and ≤ 20 × 10⁻⁶ for N₂.
Carbon dioxide (CO₂) volume fraction must not exceed 1 × 10⁻⁶ in Pure oxygen, 0.5 × 10⁻⁶ in High purity oxygen, and 0.1 × 10⁻⁶ in Ultrapure oxygen.
